15 October 2001 Layout techniques for VLSI yield enhancement
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Proceedings Volume 4600, Advances in Microelectronic Device Technology; (2001) https://doi.org/10.1117/12.444666
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
Advances in semiconductor technology allow the manufacture of VLSI circuits with millions of transistors. With the increase in chip size and the decrease in layout feature size, yield loss due to manufacturing defects has become a serious problem. To overcome this problem, various defect-tolerant techniques have been developed to reduce the design sensitivity to manufacturing defects. This paper reviews techniques for yield enhancement in compaction, routing, and floorplanning stages of layout design.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhan Chen, Zhan Chen, Lixin Zhang, Lixin Zhang, } "Layout techniques for VLSI yield enhancement", Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); doi: 10.1117/12.444666; https://doi.org/10.1117/12.444666

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