15 October 2001 Tunable F-P optical filter based on microcavity structure
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Proceedings Volume 4600, Advances in Microelectronic Device Technology; (2001) https://doi.org/10.1117/12.444670
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
Abstract
F-P optical thin film filter based on glass was designed and built using thin film coating and RIE technology. Photoresist was the sacrificial layer and later was removed by dry etching.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Min Chen, Xu Liu, Haifeng Li, "Tunable F-P optical filter based on microcavity structure", Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); doi: 10.1117/12.444670; https://doi.org/10.1117/12.444670
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