PROCEEDINGS VOLUME 4601
INTERNATIONAL SYMPOSIUM ON OPTOELECTONICS AND MICROELECTRONICS | 7-10 NOVEMBER 2001
Micromachining and Microfabrication Process Technology and Devices
IN THIS VOLUME

9 Sessions, 75 Papers, 0 Presentations
Sensors II  (7)
Actuation  (6)
Sensors I  (6)
Modeling  (5)
INTERNATIONAL SYMPOSIUM ON OPTOELECTONICS AND MICROELECTRONICS
7-10 November 2001
Nanjing, China
Sensors II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 256 (15 October 2001); doi: 10.1117/12.444684
Micromachining I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 67 (15 October 2001); doi: 10.1117/12.444695
Optical Devices
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 115 (15 October 2001); doi: 10.1117/12.444715
Sensors II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 221 (15 October 2001); doi: 10.1117/12.444733
Actuation
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 123 (15 October 2001); doi: 10.1117/12.444741
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 260 (15 October 2001); doi: 10.1117/12.444758
Micromachining II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 196 (15 October 2001); doi: 10.1117/12.444685
Actuation
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 138 (15 October 2001); doi: 10.1117/12.444686
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 266 (15 October 2001); doi: 10.1117/12.444687
Sensors II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 226 (15 October 2001); doi: 10.1117/12.444688
Optical Devices
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 89 (15 October 2001); doi: 10.1117/12.444689
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 271 (15 October 2001); doi: 10.1117/12.444690
Micromachining I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 73 (15 October 2001); doi: 10.1117/12.444691
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 278 (15 October 2001); doi: 10.1117/12.444692
Sensors I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 25 (15 October 2001); doi: 10.1117/12.444693
Modeling
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 167 (15 October 2001); doi: 10.1117/12.444694
Sensors I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 31 (15 October 2001); doi: 10.1117/12.444696
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 284 (15 October 2001); doi: 10.1117/12.444697
Micromachining II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 200 (15 October 2001); doi: 10.1117/12.444698
Actuation
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 131 (15 October 2001); doi: 10.1117/12.444699
RF Applications
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 14 (15 October 2001); doi: 10.1117/12.444700
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 288 (15 October 2001); doi: 10.1117/12.444701
Modeling
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 173 (15 October 2001); doi: 10.1117/12.444702
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 293 (15 October 2001); doi: 10.1117/12.444703
Micromachining II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 205 (15 October 2001); doi: 10.1117/12.444704
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 298 (15 October 2001); doi: 10.1117/12.444705
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 306 (15 October 2001); doi: 10.1117/12.444706
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 312 (15 October 2001); doi: 10.1117/12.444707
Modeling
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 181 (15 October 2001); doi: 10.1117/12.444708
Sensors II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 234 (15 October 2001); doi: 10.1117/12.444709
Modeling
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 186 (15 October 2001); doi: 10.1117/12.444710
Sensors II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 248 (15 October 2001); doi: 10.1117/12.444711
Optical Devices
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 119 (15 October 2001); doi: 10.1117/12.444712
Micromachining I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 84 (15 October 2001); doi: 10.1117/12.444713
Actuation
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 161 (15 October 2001); doi: 10.1117/12.444714
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 153 (15 October 2001); doi: 10.1117/12.444716
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 318 (15 October 2001); doi: 10.1117/12.444717
Micromachining I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 59 (15 October 2001); doi: 10.1117/12.444718
Sensors I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 38 (15 October 2001); doi: 10.1117/12.444719
Optical Devices
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 97 (15 October 2001); doi: 10.1117/12.444720
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 324 (15 October 2001); doi: 10.1117/12.444721
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 328 (15 October 2001); doi: 10.1117/12.444722
Sensors II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 242 (15 October 2001); doi: 10.1117/12.444723
Sensors I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 43 (15 October 2001); doi: 10.1117/12.444724
RF Applications
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 20 (15 October 2001); doi: 10.1117/12.444725
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 334 (15 October 2001); doi: 10.1117/12.444726
Sensors I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 48 (15 October 2001); doi: 10.1117/12.444727
Micromachining II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 210 (15 October 2001); doi: 10.1117/12.444728
Sensors II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 238 (15 October 2001); doi: 10.1117/12.444729
Actuation
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 147 (15 October 2001); doi: 10.1117/12.444730
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 340 (15 October 2001); doi: 10.1117/12.444731
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 346 (15 October 2001); doi: 10.1117/12.444732
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 354 (15 October 2001); doi: 10.1117/12.444734
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 360 (15 October 2001); doi: 10.1117/12.444735
Micromachining I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 79 (15 October 2001); doi: 10.1117/12.444736
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 363 (15 October 2001); doi: 10.1117/12.444737
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 370 (15 October 2001); doi: 10.1117/12.444738
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 379 (15 October 2001); doi: 10.1117/12.444739
Optical Devices
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 104 (15 October 2001); doi: 10.1117/12.444740
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 109 (15 October 2001); doi: 10.1117/12.444742
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 384 (15 October 2001); doi: 10.1117/12.444743
Modeling
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 191 (15 October 2001); doi: 10.1117/12.444744
RF Applications
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 8 (15 October 2001); doi: 10.1117/12.444745
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 390 (15 October 2001); doi: 10.1117/12.444746
Sensors I
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 54 (15 October 2001); doi: 10.1117/12.444747
Micromachining II
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 216 (15 October 2001); doi: 10.1117/12.444748
Poster Session
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 396 (15 October 2001); doi: 10.1117/12.444749
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 401 (15 October 2001); doi: 10.1117/12.444750
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 406 (15 October 2001); doi: 10.1117/12.444751
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 412 (15 October 2001); doi: 10.1117/12.444752
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 417 (15 October 2001); doi: 10.1117/12.444753
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 422 (15 October 2001); doi: 10.1117/12.444754
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 428 (15 October 2001); doi: 10.1117/12.444755
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 434 (15 October 2001); doi: 10.1117/12.444756
RF Applications
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, pg 1 (15 October 2001); doi: 10.1117/12.444757
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