15 October 2001 All-fiber sinusoidal phase-modulating laser diode interferometer insensitive to the intensity change of the light source
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Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444742
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
Abstract
In this paper, we proposed a new all fiber laser diode sinusoidal phase-modulating interferometer insensitive to the intensity change of light source. In a laser diode interferometer with a photothermal modulation, intensity modulation of the laser diode is negligible, but the maximum frequency of the photothermal modulation is less than that of injection current modulation. And beam diameter is too large to be used to measure some minute objects such as some components in micro-electro-mechanical system. In this paper, we proposed an all fiber interferometer, in which the effect of the intensity change of the laser diode on measurement is eliminated. The diameter of the light beam is only 0.5 mm. Using this interferometer, we measured displacements of a piezoelectric transducer. The measurement repeatability is less than 1 nanometer.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xuefeng Wang, Xiangzhao Wang, Caini Zhang, Danyang Yu, Gaoting Chen, "All-fiber sinusoidal phase-modulating laser diode interferometer insensitive to the intensity change of the light source", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444742; https://doi.org/10.1117/12.444742
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