Design, fabrication, and characteristics of microheaters with low consumption power using SDB SOI membrane and trench structures

Gwiy-Sang Chung; Sung-Kyu Choi; Hoy-Duck Nam

doi:10.1117/12.444732

15 October 2001 Design, fabrication, and characteristics of microheaters with low consumption power using SDB SOI membrane and trench structures

Gwiy-Sang Chung, Sung-Kyu Choi, Hoy-Duck Nam

Author Affiliations +

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444732
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SDB and SOI membranes and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10 micrometers thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro- heater was fabricated with Pt-RTD on the same substrate by using MgO as medium layer. The thermal characteristics of the micro-heater with the SOI membrane is 280 degree(s)C at input power 0.9 W; for the SOI membrane with 10 trenches, it is 580 degree(s)C due to reduction of the external thermal loss. Consequently, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

Citation Download Citation

Gwiy-Sang Chung, Sung-Kyu Choi, and Hoy-Duck Nam "Design, fabrication, and characteristics of microheaters with low consumption power using SDB SOI membrane and trench structures", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444732

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