15 October 2001 Design of thin-film-based microgrippers
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Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444741
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
Abstract
In this paper, we present the results of theoretical study of thin film technique based micro grippers. Three most popular actuation mechanisms, namely, piezoelectric, bimetal and shape memory alloy are investigated. First, we present the simulation results against the measured behavior of NiTi shape memory alloy thin film based micro grippers. Then we compare the performances of these three kinds of micro grippers. It shows that shape memory alloy based micro gripper is much better than the others.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Weiming Huang, Weiming Huang, Xiangyang Gao, Xiangyang Gao, Jun Ping Tan, Jun Ping Tan, } "Design of thin-film-based microgrippers", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444741; https://doi.org/10.1117/12.444741
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