Development of microflowmeters and microlenses using a new 3D microfabrication-DEM technique

Di Chen; Min Tang; Zhimin Wang; Changmin Li; Zhiping Ni; Di Zhou

doi:10.1117/12.444717

15 October 2001 Development of microflowmeters and microlenses using a new 3D microfabrication-DEM technique

Di Chen, Min Tang, Zhimin Wang, Changmin Li, Zhiping Ni, Di Zhou

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444717
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

DEM (Deepetching, Electroforming and Microreplication) technique is a new three-dimensional micro fabrication technique for non-silicon materials developed by present authors. This technique has the advantages of lower cost and shorter process period than LIGA technique. In the present research, we developed micro flowmeters and microlenses using DEM technique. The chambers of micro flowmeters have a thickness of 160 microns and the diameters of micro impellers were from 0.5 to 2 mm. The micro flowmeter chambers were from transparent polymers and fabricated using microreplication process. DEM technique offers a new way for fabrication of MEMS and MOEMS components.

Citation Download Citation

Di Chen, Min Tang, Zhimin Wang, Changmin Li, Zhiping Ni, and Di Zhou "Development of microflowmeters and microlenses using a new 3D microfabrication-DEM technique", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444717

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