15 October 2001 Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results
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Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444707
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
Abstract
Many kinds of bulk hydrogen absorbing alloys undergo dramatic volume expansion when they absorb hydrogen. The maximum volume change varies with substances in the range of several to over twenty percents. Based on these phenomena, a new type of electrochemical microactuator has been designed. Bilayers of hydrogen absorbing alloy and nickel can generate a large bending and deliver high force, and it can work at very low voltage. As the first prototype, MmNi5 alloy film was chosen as the actuating medium, and it is deposited by sputtering method. The principle of this new microacturator and the microfabricating process of this bimorph are presented.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guifu Ding, Guifu Ding, Yi Zhang, Yi Zhang, Chunsheng Yang, Chunsheng Yang, Xiaolin Zhao, Xiaolin Zhao, Aibin Yu, Aibin Yu, Tianhui Shen, Tianhui Shen, } "Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444707; https://doi.org/10.1117/12.444707
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