15 October 2001 MEMS-based variable optical attenuator
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Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444720
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
Power management is an increasingly concerned issue in Dense Wavelength Division Multiplexed (DWDM) network. It poses strict comprehensive requirements, such as electronic controllability, cost and volume, etc, on the Variable Optical Attenuator (VOA). The characteristics of MEMS technology make it to be one of the most prospective candidates to meet these requirements. This paper consists of three parts. The first part is a description of VOA application in all-optic network. In the light of these aspects, the main requirements for VOA devices are quantitatively identified. In the second part, the current situation of research on MEMS based VOA is presented extensively. Finally, several novel applications of MEMS based VOA in all optic networks are illustrated. It illustrates the premise that MEMS VOA can bring added capability or new functionality to optical designs and increase the incentive to explore their potential in lightwave subsystems. Considering the attractive market volume in 2008, MEMS based VOA seems to be one of the most prospective candidates for the commercialization of optical MEMS technology.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xuhan Dai, Xiaolin Zhao, Wenjun Li, Bingchu Cai, "MEMS-based variable optical attenuator", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444720; https://doi.org/10.1117/12.444720

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