15 October 2001 Microsensors and actuator arrays based on Pb(Zr,Ti)O3 thin film for AFM data storage
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Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444739
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
Abstract
In order to deal with problems in SFM-based data storage, such as low data rate and tip stabilities, we designed and fabricated a micro cantilevers array based on Pb(Zr, Ti)O3 (PZT) thin films. The data rate can be improved by parallel operation using the cantilevers array. And the tip wearing can be slowed down by a thermal mechanical writing mechanism using micro-heaters integrated on the tips, also taking advantage of the independent active tip-sampling spacing control by applying different DV bias to each PZT cantilever. The PZT film was prepared by a modified sol-gel process and electrostatic-spray coating method. The prototype of cantilevers array has been fabricated and characterized. With such a device, data bits with size of about 50nm was recorded and readout in the experiments.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiaru Chu, Jiaru Chu, Junfeng Lu, Junfeng Lu, Yicheng Wu, Yicheng Wu, Wenhao Huang, Wenhao Huang, Ryutaro Maeda, Ryutaro Maeda, Toshihiro Itoh, Toshihiro Itoh, Tadatomo Suga, Tadatomo Suga, } "Microsensors and actuator arrays based on Pb(Zr,Ti)O3 thin film for AFM data storage", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444739; https://doi.org/10.1117/12.444739
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