15 October 2001 Phase detection scheme of vibratory gyroscope by 2D driving operation
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Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444696
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
Abstract
Conventionally, a one-dimensional vibratory gyroscope is excited into vibration int the x-direction and detection is made for an angular rate around the z-axis by measuring the induced vibration in the y-direction. Proposed in this paper is a novel operation mode. In this operation mode, excitation is made in both the x- and y-directions and the angular rate around the z-axis causes the phase variation of the vibrations. Therefore, the angular rate signal can be detected by measuring the phase change of the output signal of the gyroscope in one of the directions. This operation scheme features high accuracy, high immunity against interference and low temperature coefficient. A bulk micromachined gyroscope with piezoresistive sensing elements is used as a test carrier for the two-dimensional excitation operation and phase detection scheme. Experimental results are presented.
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Heng Yang, Heng Yang, Minhang Bao, Minhang Bao, Hao Yin, Hao Yin, Shaoqun Shen, Shaoqun Shen, Bin Xiong, Bin Xiong, } "Phase detection scheme of vibratory gyroscope by 2D driving operation", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444696; https://doi.org/10.1117/12.444696
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