Position sensor in micro-electro-mechanical systems using a self-mixing laser diode

Ming Wang; Shouping Nie

doi:10.1117/12.444733

15 October 2001 Position sensor in micro-electro-mechanical systems using a self-mixing laser diode

Ming Wang, Shouping Nie

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444733
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Many optical sensors for the displacement measurement in sub-micron have been developed. In this paper, we propose a new type of self-mixing interferometry (SMI) to measure microscopic displacement in microelectromechanical systems(MEMS). The phase of SMI signal is modulated with external cavity length and demodulated by signal analysis technique. The experimental system was developed to have a sensitivity of several nanometers for displacement sensing.

Citation Download Citation

Ming Wang and Shouping Nie "Position sensor in micro-electro-mechanical systems using a self-mixing laser diode", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444733

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available