Development of novel optical switches based on the MEMS electromagnetic micro-actuator

Shuhai Jia; Xiaolin Zhao; Sheng Zhang; Bingchu Cai; Jianzhi Feng

doi:10.1117/12.445755

16 October 2001 Development of novel optical switches based on the MEMS electromagnetic micro-actuator

Shuhai Jia, Xiaolin Zhao, Sheng Zhang, Bingchu Cai, Jianzhi Feng

Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445755
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

This paper reports on the design, fabrication and performance of some novel MEMS (Micro-electro-mechanical system) optical switches. We have developed a new kind of MEMS electromagnetic micro actuator, which can drive mirrors enter or leave the optical path of switch. The 1 X 2, 2 X 2, 1 X 4 and 1 X 8 single mode optic-fiber switches have been fabricated. The switching voltage is less than 8 V and the switching time is no more than 5 ms. Using optic-fiber collimator for light coupling, we obtain small insertion loss (> -0.8 dB), considering the length of the light path is 40 mm. The cross-talk is less than -60 dB, extinction ratio is -60 dB.

Citation Download Citation

Shuhai Jia, Xiaolin Zhao, Sheng Zhang, Bingchu Cai, and Jianzhi Feng "Development of novel optical switches based on the MEMS electromagnetic micro-actuator", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445755

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