16 October 2001 Development of novel optical switches based on the MEMS electromagnetic micro-actuator
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Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445755
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
Abstract
This paper reports on the design, fabrication and performance of some novel MEMS (Micro-electro-mechanical system) optical switches. We have developed a new kind of MEMS electromagnetic micro actuator, which can drive mirrors enter or leave the optical path of switch. The 1 X 2, 2 X 2, 1 X 4 and 1 X 8 single mode optic-fiber switches have been fabricated. The switching voltage is less than 8 V and the switching time is no more than 5 ms. Using optic-fiber collimator for light coupling, we obtain small insertion loss (> -0.8 dB), considering the length of the light path is 40 mm. The cross-talk is less than -60 dB, extinction ratio is -60 dB.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shuhai Jia, Shuhai Jia, Xiaolin Zhao, Xiaolin Zhao, Sheng Zhang, Sheng Zhang, Bingchu Cai, Bingchu Cai, Jianzhi Feng, Jianzhi Feng, } "Development of novel optical switches based on the MEMS electromagnetic micro-actuator", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); doi: 10.1117/12.445755; https://doi.org/10.1117/12.445755
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