Numerical approximation of thermal conductivity depth distributions by the modulated photoreflectance data

Jianxin Zhu

doi:10.1117/12.445698

16 October 2001 Numerical approximation of thermal conductivity depth distributions by the modulated photoreflectance data

Jianxin Zhu

Author Affiliations +

Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445698
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Photoacoustic measurement techniques can be used to determine thermal properties on and below the sample's surface, thus subsurface thermal inhomogeneities, such as continuous distributions of thermal parameters, become measurable by photoacoustic methods. In this paper, a numerical reconstruction treatment of thermal conductivity depth distribution is provided. Some simulation examples show that the method can be used in inverse computation of thermal conductivity by surface modulated photoreflectance signals.

Citation Download Citation

Jianxin Zhu "Numerical approximation of thermal conductivity depth distributions by the modulated photoreflectance data", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445698

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