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16 October 2001 Numerical approximation of thermal conductivity depth distributions by the modulated photoreflectance data
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Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445698
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
Abstract
Photoacoustic measurement techniques can be used to determine thermal properties on and below the sample's surface, thus subsurface thermal inhomogeneities, such as continuous distributions of thermal parameters, become measurable by photoacoustic methods. In this paper, a numerical reconstruction treatment of thermal conductivity depth distribution is provided. Some simulation examples show that the method can be used in inverse computation of thermal conductivity by surface modulated photoreflectance signals.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jianxin Zhu "Numerical approximation of thermal conductivity depth distributions by the modulated photoreflectance data", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445698
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