16 October 2001 Photodiodes of CVD diamond films
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Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445703
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China
The diamond-based photodetectors were investigated. The diamond films were synthesized by microwave plasma assisted chemical vapor deposition. The films were characterized by scanning electron microscopy and Raman spectroscopy etc. The photodiode structures were fabricated on the free standing diamond films. The experimental results showed that the devices exhibited a strong UV photoresponse. It was found that the structures of the diamond films have a significant effect on the performance of the devices. The photoconductive gain of heteroepitaxial diamond films was greater than that of polycrystalline diamond films.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wanlu Wang, Wanlu Wang, Kejun Liao, Kejun Liao, Chunyang Kong, Chunyang Kong, L. Fang, L. Fang, } "Photodiodes of CVD diamond films", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); doi: 10.1117/12.445703; https://doi.org/10.1117/12.445703

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