Research on the scanning system of fiber optic confocal microscope

Xinglong Wang; Zeying Chi; Wenjian Chen; Shuaia Wu

doi:10.1117/12.445744

16 October 2001 Research on the scanning system of fiber optic confocal microscope

Xinglong Wang, Zeying Chi, Wenjian Chen, Shuaia Wu

Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445744
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Using dual-galvanometer optical scanning head as the reflecting type optic-fiber confocal scanning microscope's planar scanning outfit can achieve the fast scanning to plane image, but there are distortion and vignetting. In the paper, the basic principle of reflecting type fiber-optical confocal scanning microscope is described briefly. The distortion caused by using the common eyepiece as scanning lens, the inherent distortion and vignetting for pre-eyepiece dual galvanometer scanning system have been analyzed in theory, and the according high-speed scanning electronic control system that has the function of distortion correction and image processing has been discussed.

Citation Download Citation

Xinglong Wang, Zeying Chi, Wenjian Chen, and Shuaia Wu "Research on the scanning system of fiber optic confocal microscope", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445744

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