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24 July 2002 Facilities for fabricating nanostructures
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Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.465456
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States
Abstract
Direct, physical manipulation of matter at the atomic level is the heart of nanostructure science and technology. This requires very special capabilities in terms of tools and personnel. In the past, emphasis has been placed on specialized equipment (e.g., e-beam tools, plasma etchers, proximal probes, etc.), and on environmental control. The point taken here is that management philosophy is at least equally important (if not more important) in achieving project success. The discussion represents a perspective, as derived from experience as director of the Nanoelectronics Processing Facility at the US Naval Research Laboratory and interactions with other Nanofabrication Facilitiesi.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christie R. Marrian "Facilities for fabricating nanostructures", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); https://doi.org/10.1117/12.465456
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