24 July 2002 Metrology break-out group
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Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.465472
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States
Abstract
Participating members: Marylyn Bennett, Bill Banke, Yues Deslandes, Tim Goldburt, Al Szeienano, Al Hatheway, Mark Schattenburg, Jay Jun, Saroshi Gonda, Mike Thompson, Kevin Lyons, Jim Potzick, Mike McElfresh, John Villarruba, George Orsi, Dominique Drouin, Alexandre Couture
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
- -, - -, "Metrology break-out group", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.465472; https://doi.org/10.1117/12.465472
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