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24 July 2002 New design and uncertainty budget for a metrology UHV-STM used in direct measurements of atom spacings
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Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.465125
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States
Abstract
A basic scheme of direct, highly accurate dimensional measurements of nanostructures is presented. We have constructed a scanning tunneling microscope (STM) unit combined with a diode laser-based Michelson interferometer module. The compact size of the STM allows it to be installed in an ultra high vacuum (UHV) chamber and is capable of measuring atomic spacings on a reconstructed single crystal surface. This method aims at direct dimensional calibration of microelectronic structures such as linewidths and line/space features. The calibrated dimensions of these features will be traceable to the international unit of length through the He-Ne laser wavelength and be a reliable standard for next generation nanostructures and nanofabrication.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Satoshi Gonda, Hui Zhou, Joseph Fu, and Richard M. Silver "New design and uncertainty budget for a metrology UHV-STM used in direct measurements of atom spacings", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); https://doi.org/10.1117/12.465125
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