24 July 2002 Power actuators for nanotechnology
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Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.465224
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States
Magnetostrictive actuators for superprecision positioning in steps of 10-2 nm over a range of displacements up to 1m have been developed and investigated. The actuators generate forces up to 104 N and are suitable as force actuators in steps of 10 nm. Exact displacement is achieved by an active element made from Terfenol D alloy based on rare-earth metals with a giant magnetostriction. The actuators can be controlled manually without any additional power source or by using a computer. For manual control the minimum linear-displacement step does not exceed 0,6 nm, and when the device is used on a turntable the minimum angular displacement step is 15-10-3 angular seconds, while for computer control these quantities are 10-2 nm and 4?10-5 angular seconds respectively. Using the above mentionned micropositionners we developed several new devices, which may radically change the situation in various high-tech fields of modern technology.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vadim I. Rakhovsky, Vadim I. Rakhovsky, } "Power actuators for nanotechnology", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.465224; https://doi.org/10.1117/12.465224

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