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21 June 2002 Multi-analyte array microdiffraction interferometry
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Proceedings Volume 4626, Biomedical Nanotechnology Architectures and Applications; (2002)
Event: International Symposium on Biomedical Optics, 2002, San Jose, CA, United States
Interferometers have maximum linear sensitivity to small optical perturbations at the half intensity point defined by quadrature when the signal and reference waves are out of phase by ninety degrees. Under this conditions optical path changes down to a billionth-lambda can be detected. We describe the fabrication of interferometric microstructures on silicon all operating at quadrature, which can have sub- micron dimensions. These dimensions could enable, in principle, the fabrication of over a billion interferometer elements on a disk the size of a CD. In addition, a spinning disk of these elements could have the capacity for mega- samples per second sampling rate. As a step towards that goal, we fabricated a 3-inch silicon wafer with 1024 micro strips of gold, each 20 micro strips of gold, each 20 microns wide and 3 cm long arranged radially. The gold was evaporated to a thickness of 79.1 nm putting them at quadrature for read-out with a 632.8 nm He-Ne laser. Bovine Serium Albumin (BSA), was immobilized on the gold micro strips on half of the wafer which had been treated with Hexadecanethiol. The presence of immobilized BSA modified the lobe structure of the far-field diffraction from the micro strips, we are currently extending these static detection result to high-sampling rates on a spinning disk.
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Manoj M. Varma, David D. Nolte, Halina D. Inerowicz, and Fred E. Regnier "Multi-analyte array microdiffraction interferometry", Proc. SPIE 4626, Biomedical Nanotechnology Architectures and Applications, (21 June 2002);

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