Effect of laser parameters on the exposure and selective etch rate in photostructurable glass

Frank E. Livingston; William W. Hansen; Adam Huang; Henry Helvajian

doi:10.1117/12.470631

18 June 2002 Effect of laser parameters on the exposure and selective etch rate in photostructurable glass

Frank E. Livingston, William W. Hansen, Adam Huang, Henry Helvajian

Proceedings Volume 4637, Photon Processing in Microelectronics and Photonics; (2002) https://doi.org/10.1117/12.470631
Event: High-Power Lasers and Applications, 2002, San Jose, California, United States

Abstract

Photostructurable glass-ceramic materials have received significant attention due to their utility in aerospace engineering and micro technology. For example, the ability to fabricate structures in glass is important in the design and integration of micro scale electronic, optical and fluidic devices. Direct-write pulsed UV laser processing techniques have been utilized recently to create patterned 3D microstructures in a lithium-aluminosilicate glass. The direct-write microfabrication process involves the formation of an initial latent image in the glass via UV laser radiation. Thermal-induced ceramization is utilized to develop the latent image into a permanent image. Material removal and microstructure fabrication are then accomplished by preferential isotropic etching of the developed regions.

Citation Download Citation

Frank E. Livingston, William W. Hansen, Adam Huang, and Henry Helvajian "Effect of laser parameters on the exposure and selective etch rate in photostructurable glass", Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); https://doi.org/10.1117/12.470631

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available