18 June 2002 F2-laser microfabrication of buried waveguide structures in transparent glasses
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Proceedings Volume 4637, Photon Processing in Microelectronics and Photonics; (2002) https://doi.org/10.1117/12.470629
Event: High-Power Lasers and Applications, 2002, San Jose, California, United States
Abstract
Buried optical waveguides have been fabricated directly in pure bulk fused silica with a novel high-resolution 157-nm optical processing system. Refractive index changes of > 10-4 were induced within the small focal volume of large numerical-aperture optics, removing the need for ultrafast laser interactions. Single-mode guiding was inferred from Gaussian-like near-field and far-field intensity distributions of 635-nm guided light. The results demonstrate a useful extension of writing buried 3D refractive index structures inside glasses with nanosecond duration UV lasers.
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Xiaoli Midori Wei, Xiaoli Midori Wei, Kevin P. Chen, Kevin P. Chen, Dragan Coric, Dragan Coric, Peter R. Herman, Peter R. Herman, Jianzhao Li, Jianzhao Li, } "F2-laser microfabrication of buried waveguide structures in transparent glasses", Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); doi: 10.1117/12.470629; https://doi.org/10.1117/12.470629
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