High-resolution F2-laser machining of micro-optic components

Jianzhao Li; Peter R. Herman; Xiaoli Midori Wei; Kevin P. Chen; Juergen Ihlemann; Gerd Marowsky; Peter Oesterlin; Berthold Burghardt

doi:10.1117/12.470627

18 June 2002 High-resolution F₂-laser machining of micro-optic components

Jianzhao Li, Peter R. Herman, Xiaoli Midori Wei, Kevin P. Chen, Juergen Ihlemann, Gerd Marowsky, Peter Oesterlin, Berthold Burghardt

Author Affiliations +

Proceedings Volume 4637, Photon Processing in Microelectronics and Photonics; (2002) https://doi.org/10.1117/12.470627
Event: High-Power Lasers and Applications, 2002, San Jose, California, United States

Abstract

The F₂-laser Nano fabrication Facility at the University of Toronto delivers high-fluence 157-nm radiation at high resolution to micro fabricate high-finesse silica-based optical components. The 7.9-eV photons drive strong material interactions near the band-edge states of fused silica and related glasses that help avoid microcrack formation, a common limitation of longer wavelength laser. The strong interactions provide for small and smooth excisions, offering depth control on a scale of tens of nanometers. A 157-nm beam homogenization system and a 25x Schwarzschild lens provided a uniform on-target fluence of 9 J/cm² in a 0.25 mm by 0.25 mm field. Larger work are was enabled by synchronously driving the projection mask and target motion stages. The 0.4 NA lens supported the formation of high- aspect channel walls and surface-relief features as small as approximately 500 nm. Both mask projection and direct writing technique were employed. The novel aspects of the optical beam delivery system are presented together with results on fabricating micro-channels, cutting optical fiber, fabricating surface relief grating and cylindrical lens. The results demonstrate broad application directions for fabricating telecommunication devices, general optical and photonic components, and biological devices.

Citation Download Citation

Jianzhao Li, Peter R. Herman, Xiaoli Midori Wei, Kevin P. Chen, Juergen Ihlemann, Gerd Marowsky, Peter Oesterlin, and Berthold Burghardt "High-resolution F₂-laser machining of micro-optic components", Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); https://doi.org/10.1117/12.470627

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