18 June 2002 Sol-gel technologies for multimode waveguide structures
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Proceedings Volume 4640, Integrated Optics: Devices, Materials, and Technologies VI; (2002) https://doi.org/10.1117/12.433291
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States
Lithographic patterning of organic-inorganic hybrid materials processed by the use of sol-gel technology allows for the generation of waveguide structures at low temperatures onto polymer or ceramic substrates. In addition, sol-gel technology provides the possibility to process precision structures, such as, grooves and cavities, which are applicable for the passive alignment of photonic devices. This provides the possibility for the realization of mass-producible photonic circuits onto large-area substrates. At the moment, the most potential applications are systems based on then use of multimode waveguide structures. Actually, when utilizing sol-gel technology, the challenge is how to process homogenous, low-loss and high-aspect-ratio structures. In addition, when aiming to highly mass-producible multimode modules, the key issue is the alignment of photonic devices preferably by the use of passive precision structures. In the future, when the systems need to be more complicated, the modeling of systems requires sophisticated 3D modeling tools. In this paper, the processing of multimode structures with sol-gel technologies is described, and the characterization results of prototype devices are reported. In addition, molding and cofiring technologies potentially applicable for the hybrid integration of photonic modules are reviewed. Finally, the future research aims for the commercialization of photonic modules based on the use of sol-gel technologies are envisioned.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pentti Karioja, Pentti Karioja, Maja Kusevic, Maja Kusevic, Marianne Hiltunen, Marianne Hiltunen, Janne Paaso, Janne Paaso, Jukka-Tapani Maekinen, Jukka-Tapani Maekinen, Jussi A. Hiltunen, Jussi A. Hiltunen, Kari Kautio, Kari Kautio, Harri K. Kopola, Harri K. Kopola, "Sol-gel technologies for multimode waveguide structures", Proc. SPIE 4640, Integrated Optics: Devices, Materials, and Technologies VI, (18 June 2002); doi: 10.1117/12.433291; https://doi.org/10.1117/12.433291


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