Fabrication and characterization of terahertz photonic crystals

Cheng-Chung Chi; Heidi T. Wang; Shi-Shy Pai; Wei-Chi Lai; Sheng-fu Horng; Ruey-Shing Star Huang

doi:10.1117/12.470424

11 June 2002 Fabrication and characterization of terahertz photonic crystals

Cheng-Chung Chi, Heidi T. Wang, Shi-Shy Pai, Wei-Chi Lai, Sheng-fu Horng, Ruey-Shing Star Huang

Proceedings Volume 4643, Ultrafast Phenomena in Semiconductors VI; (2002) https://doi.org/10.1117/12.470424
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

Two dimensional (2D) terahertz (THz) photonic crystals were fabricated by stacking micro-machined high-resistance silicon substrates. The transmission spectra through 1 to 8 stacked silicon substrates with polarization parallel and perpendicular to the grooves were measured. At normal incidence with either polarization the normalized transmission spectrum quickly converges as the number of stacked substrates increases. For as few as three stacked Si substrates, the observed transmission spectra for the first two bands converge reasonably well to the calculated results for an infinite lattice. The agreement is better at frequencies lower than 0.4 THz, while it becomes worse at higher frequencies. At oblique incidence, the wave vector direction inside the photonic crystal depends on both incident angle and frequency. The calculated direction from the 2D energy dispersion determines the experimentally observed transmission spectrum. The agreement between the measured results and calculation is reasonable, though some discrepancies remain unaccountable.

Citation Download Citation

Cheng-Chung Chi, Heidi T. Wang, Shi-Shy Pai, Wei-Chi Lai, Sheng-fu Horng, and Ruey-Shing Star Huang "Fabrication and characterization of terahertz photonic crystals", Proc. SPIE 4643, Ultrafast Phenomena in Semiconductors VI, (11 June 2002); https://doi.org/10.1117/12.470424

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available