Paper
30 April 2002 Electron temperature and ion velocity distribution of erosion plume under ablation of Cu target
Oleg Alexeyevic Novodvorsky, Olga D. Khramova, Elena O. Filippova, Alexsandr K. Shevelev, Christian Wenzel, J. W. Bartha
Author Affiliations +
Proceedings Volume 4644, Seventh International Conference on Laser and Laser-Information Technologies; (2002) https://doi.org/10.1117/12.464167
Event: Seventh International Conference on Laser and Laser Information Technologies, 2001, Vladimir, Suzdal, Russian Federation
Abstract
The time-of-flight probe method was used in investigations of erosion plume in ablation of copper with 308 nm radiation of excimer XeCl laser in vacuum. The time-of-flight curves of electron and ion currents at the probe were obtained in the range from 0.2 to 2.2 J/cm-2 of energy densities at the target with probe-to-target separations from 10 to 133 mm. Multimodal distributions of ions by scatter velocities have been revealed. The voltage-current curves of probe current have been constructed in the range of probe potentials +/- 18 V. The electron temperature has been calculated for different plume regions. It has been revealed that the plume electron temperature is nonuniform.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Oleg Alexeyevic Novodvorsky, Olga D. Khramova, Elena O. Filippova, Alexsandr K. Shevelev, Christian Wenzel, and J. W. Bartha "Electron temperature and ion velocity distribution of erosion plume under ablation of Cu target", Proc. SPIE 4644, Seventh International Conference on Laser and Laser-Information Technologies, (30 April 2002); https://doi.org/10.1117/12.464167
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KEYWORDS
Ions

Copper

Laser ablation

Excimer lasers

Diffusion

Particles

Chlorine

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