Peculiarities of solid-phase silicon surface laser-induced damage in vacuum and in various gases

Alexander F. Banishev; Vladimir S. Golubev; Alexei Yu. Kremnev

doi:10.1117/12.464127

30 April 2002 Peculiarities of solid-phase silicon surface laser-induced damage in vacuum and in various gases

Alexander F. Banishev, Vladimir S. Golubev, Alexei Yu. Kremnev

Proceedings Volume 4644, Seventh International Conference on Laser and Laser-Information Technologies; (2002) https://doi.org/10.1117/12.464127
Event: Seventh International Conference on Laser and Laser Information Technologies, 2001, Vladimir, Suzdal, Russian Federation

Abstract

In the paper the peculiarities of relief inhomogeneities formation on silicon surface were investigated at irradiation by submicrosecond laser pulses in various gases. It was shown that the development and relaxation time of these inhomogeneities poorly depends on a type of gas.

Citation Download Citation

Alexander F. Banishev, Vladimir S. Golubev, and Alexei Yu. Kremnev "Peculiarities of solid-phase silicon surface laser-induced damage in vacuum and in various gases", Proc. SPIE 4644, Seventh International Conference on Laser and Laser-Information Technologies, (30 April 2002); https://doi.org/10.1117/12.464127

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