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12 June 2002 Ultrawide continuously tunable 1.55-μm vertical-air-cavity filters and VCSELs based on micromachined electrostatic actuation
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Proceedings Volume 4646, Physics and Simulation of Optoelectronic Devices X; (2002) https://doi.org/10.1117/12.470511
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States
Abstract
We study 1.55micrometers filter and VCSEL devices capable of wide and continuous tuning based on a single control parameter. Ultra-high reflective DBR mirrors are realized with a low number of DBR periods using high refractive index contrast: (I) (Delta) n=2.17 for InP/airgap DBR's (3.5 periods) and (II) (Delta) n=0.5 for Si3N4/SiO2 DBR's (12 periods) with a polymer sacrificial layer to implement the air-cavity. Corresponding fabrication technologies are presented in detail. In both cases spectral tuning (>100nm, theoretically) is obtained by micomachined actuation of the included air-cavity. Large stopband widths and very large tuning efficiencies are obtained by model calculations. For VCSEL's a trade-off between lasing efficiency and tuning efficiency is obtained. Experimental results show very good optical properties: high mirror reflectance and clear single-line filter transmission. The first tunable dielectric filter based on polymer sacrificial layers is presented: (Delta) (lambda) /(Delta) U= -7nm/V at 1mA. The potential of the airgap concept: the filter transmission or the laser emission wavelength can be continuously tuned over more than 100nm, thus, the whole spectral gain profile can be addressed by a single control parameter.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hartmut Hillmer, Juergen Daleiden, Cornelia Prott, Friedhard Roemer, Amer Tarraf, Soeren Irmer, Ventzeslav Rangelov, S. Schueler, and Martin Strassner "Ultrawide continuously tunable 1.55-μm vertical-air-cavity filters and VCSELs based on micromachined electrostatic actuation", Proc. SPIE 4646, Physics and Simulation of Optoelectronic Devices X, (12 June 2002); https://doi.org/10.1117/12.470511
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