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3 June 2002 Cantilever microscanners for free-space optical interconnects
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Proceedings Volume 4652, Optoelectronic Interconnects, Integrated Circuits, and Packaging; (2002) https://doi.org/10.1117/12.469569
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States
Abstract
Two-dimensional (2D) scanners can be used for displays, printers, optical data storage devices, optical scanning microscopes, and free-space optical interconnects. In this paper, we will describe the modeling and simulation of a novel cantilever microscanner. The scanner is actuated using electrostatic force. The cantilever beam connects to the top electrode. The bottom four electrodes on the substrate provide extra feedback for the control of the cantilever beam. A thorough mechanical analysis (both static and dynamic) using Finite Element Analysis has been performed. Key design parameters such as driving voltage, tilt angle and resonant frequencies have been investigated. The model has not been verified by experimental data but a fabrication process flow has been designed. The fabrication of this novel cantilever microscanner is in progress.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bai Xu, Natalya Tokranova, James Castracane, and Dong Yan "Cantilever microscanners for free-space optical interconnects", Proc. SPIE 4652, Optoelectronic Interconnects, Integrated Circuits, and Packaging, (3 June 2002); doi: 10.1117/12.469569; https://doi.org/10.1117/12.469569
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