Optical transceiver on silicon with self-aligned laser diode

Hans Joachim Heider; Stefan Wiechmann; Matthias Mahnke; Joerg Mueller

doi:10.1117/12.469581

3 June 2002 Optical transceiver on silicon with self-aligned laser diode

Hans Joachim Heider, Stefan Wiechmann, Matthias Mahnke, Joerg Mueller

Proceedings Volume 4652, Optoelectronic Interconnects, Integrated Circuits, and Packaging; (2002) https://doi.org/10.1117/12.469581
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

An optical transceiver is presented consisting of a polarization insensitive directional coupler, a hybrid integrated self-aligned laser diode and a hybrid integrated photodiode. In order to increase waveguide-fiber coupling, the fiber is connected to a tapered waveguide. The polarization insensitive directional coupler is designed for separation of the transmitting ((lambda) equals1.3 micrometers ) and the receiving ((lambda) equals1.55 micrometers ) wavelengths. The coupler is based on Al₂O₃ waveguides realized by MOPECVD processes. These waveguides show attenuation below 0.3 dB/cm at the wavelengths of interest after annealing at ~700 degree(s)C. The hybrid integration of the laser diode is realized by a self-aligned soldering process. Electroplated tin/gold is used as the solder, while the pre-positioning of the laser diode is achieved by a fine-placer. After self-alignment, the misalignment of the laser has to be smaller than +/- 0.5 micrometers vertical and +/- 1.5 micrometers lateral to achieve coupling losses below 3 dB. Vertical mirrors are used for guiding the signal on the chip to reduce optical losses and chip size. The waveguide-fiber coupling is optimized by a tapered waveguide during the deposition of the Al₂O₃ layer by a KOH-etched silicon mask. The lateral positioning of the fiber is guaranteed by the vertically etched walls of the waveguide improving the properties of the coupling facet. The depth of the fiber groove is machined by an isotropic silicon plasma etch process.

Citation Download Citation

Hans Joachim Heider, Stefan Wiechmann, Matthias Mahnke, and Joerg Mueller "Optical transceiver on silicon with self-aligned laser diode", Proc. SPIE 4652, Optoelectronic Interconnects, Integrated Circuits, and Packaging, (3 June 2002); https://doi.org/10.1117/12.469581

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