Translator Disclaimer
23 May 2002 Design and fabrication of a micromirror array for autostereoscopic 3D displays
Author Affiliations +
We designed and fabricated the first, to the best of our knowledge, micromirror array for autostereoscopic 3D display systems. We conducted the optical and Micro-Electrical- Mechanical-System (MEMS) design concurrently, and fabricated several 20x20 micromirror arrays, with micromirror size of 460x460 microns. Both electrostatic and magnetic actuation methods were used to achieve deflection angles of +/- 0.8 degrees. We used these micromirror arrays with backlit transparencies to build a 2-view (left and right) autostereoscopic 3-D display system.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun Yan, Stephen T. Kowel, Hyoung J. Cho, and Chong Hyuk Ahn "Design and fabrication of a micromirror array for autostereoscopic 3D displays", Proc. SPIE 4660, Stereoscopic Displays and Virtual Reality Systems IX, (23 May 2002);


Fabrication of microshutter arrays for space application
Proceedings of SPIE (April 29 2001)
Wafer charging in different types of plasma etchers
Proceedings of SPIE (January 31 1992)
Double-sided MEMS mirror for L-switching matrix
Proceedings of SPIE (January 14 2003)
Reactive ion etching of Al alloy and silicon dioxide films...
Proceedings of SPIE (February 14 1994)
Silicon as material for mechanical wristwatches
Proceedings of SPIE (April 18 2002)

Back to Top