24 April 2002 128x96 pixel field emitter-array image sensor with HARP target
Author Affiliations +
Abstract
In pursuit of developing a next-generation pick-up device having high definition and ultrahigh sensitivity features, research continues on a new type of image sensor that combines a HARP target and a field emitter array. A new field emitter array on a small-sized substrate is designed and a unique packaging technique is proposed. The prototype device is sealed in a vacuum package with a thickness of only about 10 mm and has 128 horizontal and 96 vertical pixels. Experimental results show that images could be successfully reproduced for the first time ever in a device of this type. Highly sensitive characteristics and propr resolution were also obtained with the device. The prototype image sensor can operate stably for more than 250 hours, demonstrating its feasibility and potential as a next- generation image pickup device.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Toshio Yamagishi, Masakazu Nanba, Katsunori Osada, Yoshiro Takiguchi, Saburo Okazaki, Norifumi Egami, Kenkichi Tanioka, Mitsuru Tanaka, Shigeo Itoh, "128x96 pixel field emitter-array image sensor with HARP target", Proc. SPIE 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III, (24 April 2002); doi: 10.1117/12.463449; https://doi.org/10.1117/12.463449
PROCEEDINGS
8 PAGES


SHARE
KEYWORDS
Finite element methods

Image sensors

Prototyping

Electrodes

Electron beams

Glasses

Packaging

RELATED CONTENT

Compositing Images for an optical butting camera
Proceedings of SPIE (October 13 2010)
Variable-focus liquid lens for portable applications
Proceedings of SPIE (October 14 2004)
First study of a flat vacuum image sensor with a...
Proceedings of SPIE (April 25 1997)
2 3 in. 2 M pixel CCD with progressive scan...
Proceedings of SPIE (May 28 1997)

Back to Top