128x96 pixel field emitter-array image sensor with HARP target

Toshio Yamagishi; Masakazu Nanba; Katsunori Osada; Yoshiro Takiguchi; Saburo Okazaki; Norifumi Egami; Kenkichi Tanioka; Mitsuru Tanaka; Shigeo Itoh

doi:10.1117/12.463449

24 April 2002 128x96 pixel field emitter-array image sensor with HARP target

Toshio Yamagishi; Masakazu Nanba; Katsunori Osada; Yoshiro Takiguchi; Saburo Okazaki; Norifumi Egami; Kenkichi Tanioka; Mitsuru Tanaka; Shigeo Itoh;

Author Affiliations +

Proceedings Volume 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III; (2002) https://doi.org/10.1117/12.463449
Event: Electronic Imaging, 2002, San Jose, California, United States

Abstract

In pursuit of developing a next-generation pick-up device having high definition and ultrahigh sensitivity features, research continues on a new type of image sensor that combines a HARP target and a field emitter array. A new field emitter array on a small-sized substrate is designed and a unique packaging technique is proposed. The prototype device is sealed in a vacuum package with a thickness of only about 10 mm and has 128 horizontal and 96 vertical pixels. Experimental results show that images could be successfully reproduced for the first time ever in a device of this type. Highly sensitive characteristics and propr resolution were also obtained with the device. The prototype image sensor can operate stably for more than 250 hours, demonstrating its feasibility and potential as a next- generation image pickup device.

Citation Download Citation

Toshio Yamagishi, Masakazu Nanba, Katsunori Osada, Yoshiro Takiguchi, Saburo Okazaki, Norifumi Egami, Kenkichi Tanioka, Mitsuru Tanaka, Shigeo Itoh, "128x96 pixel field emitter-array image sensor with HARP target", Proc. SPIE 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III, (24 April 2002); doi: 10.1117/12.463449; https://doi.org/10.1117/12.463449

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