Deep-UV-sensitive high-frame-rate backside-illuminated CCD camera developments

Robin M. Dawson; Robert Andreas; James T. Andrews; Mahalingham Bhaskaran; Robert Farkas; David Furst; Sergey Gershstein; Mark S. Grygon; Peter A. Levine; Grazyna M. Meray; Michael O'Neal; Steve N. Perna; Donald Proefrock; Michael Reale; Ramazan Soydan; Thomas M. Sudol; Pradyumna K. Swain; John R. Tower; Pete Zanzucchi

doi:10.1117/12.463424

24 April 2002 Deep-UV-sensitive high-frame-rate backside-illuminated CCD camera developments

Robin M. Dawson, Robert Andreas, James T. Andrews, Mahalingham Bhaskaran, Robert Farkas, David Furst, Sergey Gershstein, Mark S. Grygon, Peter A. Levine, Grazyna M. Meray, Michael O'Neal, Steve N. Perna, Donald Proefrock, Michael Reale, Ramazan Soydan, Thomas M. Sudol, Pradyumna K. Swain, John R. Tower, Pete Zanzucchi

Author Affiliations +

Proceedings Volume 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III; (2002) https://doi.org/10.1117/12.463424
Event: Electronic Imaging, 2002, San Jose, California, United States

Abstract

New applications for ultra-violet imaging are emerging in the fields of drug discovery and industrial inspection. High throughput is critical for these applications where millions of drug combinations are analyzed in secondary screenings or high rate inspection of small feature sizes over large areas is required. Sarnoff demonstrated in1990 a back illuminated, 1024 X 1024, 18 um pixel, split-frame-transfer device running at > 150 frames per second with high sensitivity in the visible spectrum. Sarnoff designed, fabricated and delivered cameras based on these CCDs and is now extending this technology to devices with higher pixel counts and higher frame rates through CCD architectural enhancements. The high sensitivities obtained in the visible spectrum are being pushed into the deep UV to support these new medical and industrial inspection applications. Sarnoff has achieved measured quantum efficiencies > 55% at 193 nm, rising to 65% at 300 nm, and remaining almost constant out to 750 nm. Optimization of the sensitivity is being pursued to tailor the quantum efficiency for particular wavelengths. Characteristics of these high frame rate CCDs and cameras will be described and results will be presented demonstrating high UV sensitivity down to 150 nm.

Citation Download Citation

Robin M. Dawson, Robert Andreas, James T. Andrews, Mahalingham Bhaskaran, Robert Farkas, David Furst, Sergey Gershstein, Mark S. Grygon, Peter A. Levine, Grazyna M. Meray, Michael O'Neal, Steve N. Perna, Donald Proefrock, Michael Reale, Ramazan Soydan, Thomas M. Sudol, Pradyumna K. Swain, John R. Tower, and Pete Zanzucchi "Deep-UV-sensitive high-frame-rate backside-illuminated CCD camera developments", Proc. SPIE 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III, (24 April 2002); https://doi.org/10.1117/12.463424

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available