24 April 2002 Deep-UV-sensitive high-frame-rate backside-illuminated CCD camera developments
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Abstract
New applications for ultra-violet imaging are emerging in the fields of drug discovery and industrial inspection. High throughput is critical for these applications where millions of drug combinations are analyzed in secondary screenings or high rate inspection of small feature sizes over large areas is required. Sarnoff demonstrated in1990 a back illuminated, 1024 X 1024, 18 um pixel, split-frame-transfer device running at > 150 frames per second with high sensitivity in the visible spectrum. Sarnoff designed, fabricated and delivered cameras based on these CCDs and is now extending this technology to devices with higher pixel counts and higher frame rates through CCD architectural enhancements. The high sensitivities obtained in the visible spectrum are being pushed into the deep UV to support these new medical and industrial inspection applications. Sarnoff has achieved measured quantum efficiencies > 55% at 193 nm, rising to 65% at 300 nm, and remaining almost constant out to 750 nm. Optimization of the sensitivity is being pursued to tailor the quantum efficiency for particular wavelengths. Characteristics of these high frame rate CCDs and cameras will be described and results will be presented demonstrating high UV sensitivity down to 150 nm.
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Robin M. Dawson, Robin M. Dawson, Robert Andreas, Robert Andreas, James T. Andrews, James T. Andrews, Mahalingham Bhaskaran, Mahalingham Bhaskaran, Robert Farkas, Robert Farkas, David Furst, David Furst, Sergey Gershstein, Sergey Gershstein, Mark S. Grygon, Mark S. Grygon, Peter A. Levine, Peter A. Levine, Grazyna M. Meray, Grazyna M. Meray, Michael O'Neal, Michael O'Neal, Steve N. Perna, Steve N. Perna, Donald Proefrock, Donald Proefrock, Michael Reale, Michael Reale, Ramazan Soydan, Ramazan Soydan, Thomas M. Sudol, Thomas M. Sudol, Pradyumna K. Swain, Pradyumna K. Swain, John R. Tower, John R. Tower, Pete Zanzucchi, Pete Zanzucchi, } "Deep-UV-sensitive high-frame-rate backside-illuminated CCD camera developments", Proc. SPIE 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III, (24 April 2002); doi: 10.1117/12.463424; https://doi.org/10.1117/12.463424
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