Front-illuminated full-frame charge-coupled-device image sensor achieves 85% peak quantum efficiency

Antonio S. Ciccarelli; William V. Davis; William Des Jardin; Hung Doan; Eric J. Meisenzahl; Laurel J. Pace; Gloria G. Putnam; Joseph E. Shepherd; Eric G. Stevens; Joseph R. Summa; Keith Wetzel

doi:10.1117/12.463447

24 April 2002 Front-illuminated full-frame charge-coupled-device image sensor achieves 85% peak quantum efficiency

Antonio S. Ciccarelli, William V. Davis, William Des Jardin, Hung Doan, Eric J. Meisenzahl, Laurel J. Pace, Gloria G. Putnam, Joseph E. Shepherd, Eric G. Stevens, Joseph R. Summa, Keith Wetzel

Author Affiliations +

Proceedings Volume 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III; (2002) https://doi.org/10.1117/12.463447
Event: Electronic Imaging, 2002, San Jose, California, United States

Abstract

A high sensitivity front-illuminated charge-coupled device (CCD) technology has been developed by combining the transparent gate technology introduced by Kodak in 1999 with the microlens technology usually employed on interline CCDs. In this new architecture, the microlens is used to focus the incoming light onto the more transparent of the two electrodes. The new sensors offer significant increases in quantum efficiency while maintaining the performance advantages of front-illuminated full-frame CCDs including 3 pA/cm² typical dark current at 25 degree(s)C, and 55 ke full well in a 6.8 micrometers pixel.

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Antonio S. Ciccarelli, William V. Davis, William Des Jardin, Hung Doan, Eric J. Meisenzahl, Laurel J. Pace, Gloria G. Putnam, Joseph E. Shepherd, Eric G. Stevens, Joseph R. Summa, and Keith Wetzel "Front-illuminated full-frame charge-coupled-device image sensor achieves 85% peak quantum efficiency", Proc. SPIE 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III, (24 April 2002); https://doi.org/10.1117/12.463447

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