3 May 2002 Large-area deposition of a polycrystalline CdZnTe film and its applicability to x-ray panel detectors with superior sensitivity
Author Affiliations +
Abstract
This paper describes our investigation of the X-ray detective characteristics of a thick polycrystalline CdZnTe film deposited on a large-area substrate. We deposited a polycrystalline CdZnTe film on a 9 inch by 9 inch substrate, and investigated its quality. It was verified to be quite uniform within the substrate. We also cut the film and connected it to a 3 inch by 3 inch TFT panel for evaluating the X-ray imaging performance. The TFT array format was 512 by 512 pixels with a pixel pitch of 150 micrometers . The thickness of the CdZnTe film was about 300 micrometers after lapping and polishing, and the film density per unit area was higher than 170 mg/cm2. The average sensitivity was 1.5E9 e-/mR/mm2; the beam condition was 80 kV with 26-mm Al filtration. The MTF measured at 1 lp/mm was 0.82. The time response and uniformity of X-ray sensitivity were not still adequate, and further improvements are in progress. In conclusion, we have demonstrated the applicability of the polycrystalline CdZnTe film to a large-area detector, although further investigations and improvements are needed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Satoshi Tokuda, Hiroyoki Kishihara, Susumu Adachi, Toshiyuki Sato, Yoshihiro Izumi, Osamu Teranuma, Yasukuni Yamane, Satoshi Yamada, "Large-area deposition of a polycrystalline CdZnTe film and its applicability to x-ray panel detectors with superior sensitivity", Proc. SPIE 4682, Medical Imaging 2002: Physics of Medical Imaging, (3 May 2002); doi: 10.1117/12.465579; https://doi.org/10.1117/12.465579
PROCEEDINGS
12 PAGES


SHARE
Back to Top