Development of high-power EUV sources for lithography

Vladimir M. Borisov; Imtiaz Ahmad; S. Goetze; Alexander S. Ivanov; Oleg B. Khristoforov; Juergen Kleinschmidt; Vladimir Korobotchko; Jens Ringling; Guido Schriever; Uwe Stamm; Aleksandr Yu. Vinokhodov

doi:10.1117/12.472338

1 July 2002 Development of high-power EUV sources for lithography

Vladimir M. Borisov, Imtiaz Ahmad, S. Goetze, Alexander S. Ivanov, Oleg B. Khristoforov, Juergen Kleinschmidt, Vladimir Korobotchko, Jens Ringling, Guido Schriever, Uwe Stamm, Aleksandr Yu. Vinokhodov

Author Affiliations +

Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002) https://doi.org/10.1117/12.472338
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

We report on the experimental status of the development of gas discharge produced plasma EUV sources for lithography based on the Z-pinch concept. The plasma size of approximately 1.3 mm X 1.5 mm has been matched to come close to the requirements resulting from the etendue of the optical system. The spatial stability of the plasma size as well as the plasma center is better than 15 percent standard deviation. The solid angle of emission is 1.8 sr, i.e. +/- 45 deg. The sources can be operated continuously at 1000 Hz repetition frequency and provide an EUV in-band power of 10 W in 1.8 sr. Spectral measurements providing in-band and out-of-band spectral distribution of the source are discussed.

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Vladimir M. Borisov, Imtiaz Ahmad, S. Goetze, Alexander S. Ivanov, Oleg B. Khristoforov, Juergen Kleinschmidt, Vladimir Korobotchko, Jens Ringling, Guido Schriever, Uwe Stamm, and Aleksandr Yu. Vinokhodov "Development of high-power EUV sources for lithography", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472338

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