1 July 2002 Lithography: a historical perspective and shape of things to come
Author Affiliations +
Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002); doi: 10.1117/12.472355
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States
Abstract
This paper takes a look at the evolution of lithography during the last 50 years and projects its future beyond the era of Next Generation Lithography (NGL). The technologies beyond NGL will require a paradigm shift from the way things are done today. Many new disciplines and processes will emerge that will need to be integrated into existing systems and procedures.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Syed A. Rizvi, "Lithography: a historical perspective and shape of things to come", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); doi: 10.1117/12.472355; https://doi.org/10.1117/12.472355
PROCEEDINGS
8 PAGES


SHARE
KEYWORDS
Molecules

Lithography

Electrons

Chemical species

Quantum dots

Semiconductors

Crystals

Back to Top