1 July 2002 Lithography: a historical perspective and shape of things to come
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This paper takes a look at the evolution of lithography during the last 50 years and projects its future beyond the era of Next Generation Lithography (NGL). The technologies beyond NGL will require a paradigm shift from the way things are done today. Many new disciplines and processes will emerge that will need to be integrated into existing systems and procedures.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Syed A. Rizvi, "Lithography: a historical perspective and shape of things to come", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); doi: 10.1117/12.472355; https://doi.org/10.1117/12.472355

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