1 July 2002 Manufacture of fly-eye mirror in an extreme-ultraviolet lithography illumination system by means of ultraprecision diamond cutting
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Abstract
This study deals with the manufacture of so-called Fly-eye mirror in EUV lithography by means of an ultraprecision 5-axis control milling technology. It is extremely difficult to manufacture a highly accurate Fly-eye mirror by conventional methods such as photolithography, mechanical cutting by a lathe, etc. since it is composed of 500 circular arc mirror elements of 15 mm in length and 1 mm in width having a spherical surface of 295 mm in radius, and there are minute steps among them. In order to manufacture Fly-eye mirror with accuracy and efficiency, the study proposes a new machining method to manufacture spherical surface with any radius by employing a rotational single-crystal diamond tool with cutting edge angle of 90 degree. Oxygen-free copper was machined by this method. The machined workpiece shows smooth spherical surface and sharp steps among them without any burrs. It is found that the proposed method has the potential of producing the Fly-eye mirror.
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Yoshinori Hashimoto, Yoshinori Hashimoto, Yoshimi Takeuchi, Yoshimi Takeuchi, Tomohiko Kawai, Tomohiko Kawai, Kiyoshi Sawada, Kiyoshi Sawada, Hideo Takino, Hideo Takino, Norio Shibata, Norio Shibata, } "Manufacture of fly-eye mirror in an extreme-ultraviolet lithography illumination system by means of ultraprecision diamond cutting", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); doi: 10.1117/12.472341; https://doi.org/10.1117/12.472341
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