1 July 2002 Nikon EPL tool development summary
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In the development of Electron Beam Projection Lithography Tool (EPL), one of the most important tasks is to develop the high-speed vacuum stage system and reliable vacuum body system. Nikon has a long history of over 22 years in precision stage development for its Optical Lithography Tools as well as over 10 years in EB instrument development such as EB 60 with NTT. Recently, lithography stages have been developed based on air bearing and linear motor technologies. It is desirable and of minimum risk to utilize those technologies for the EPL system in order to shorten total time period of development, but the requirements for the EB stage and body are much different from their optical counterparts and much more difficult. In this paper, development and implementation of EPL vacuum stage system, vacuum body system, vacuum loader system, and control system are discussed and over viewed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takaharu Miura, Takaharu Miura, Tatsuo Sato, Tatsuo Sato, Masaya Miyazaki, Masaya Miyazaki, Kazunari Hada, Kazunari Hada, Yu Sato, Yu Sato, Masateru Tokunaga, Masateru Tokunaga, } "Nikon EPL tool development summary", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); doi: 10.1117/12.472330; https://doi.org/10.1117/12.472330

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