Roll-to-roll manufacturing of thin film electronics

James R. Sheats

doi:10.1117/12.472297

1 July 2002 Roll-to-roll manufacturing of thin film electronics

James R. Sheats

Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002) https://doi.org/10.1117/12.472297
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

The development and current status of roll-to-roll manufacturing processes and equipment relevant to the fabrication of patterned, active electronic devices such as thin film transistors (TFTs) is reviewed, along with a survey of the knowledge of processing for thin film electronics on flexible (especially polymer) substrates. It is concluded that while there are a number of unknowns and engineering challenges, there is no fundamental obstacle to the implementation of such processes, which will have profound value in production cost and product characteristics. The first amorphous silicon TFT made with roll-to-roll processing is reported.

Citation Download Citation

James R. Sheats "Roll-to-roll manufacturing of thin film electronics", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472297

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