16 July 2002 2D-image-based CD-SEM applications for thin film head metrology
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Srinath Venkataram, Srinath Venkataram, Neeraj Khanna, Neeraj Khanna, Sanford Lewis, Sanford Lewis, Gautam Khera, Gautam Khera, } "2D-image-based CD-SEM applications for thin film head metrology", Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); doi: 10.1117/12.473416; https://doi.org/10.1117/12.473416
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