Alternative approach for direct APC using scatterometry data

Boaz Brill; Yoel Cohen; Igor Turovets; Dario Elyasy; Tzevi Beatus

doi:10.1117/12.473521

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16 July 2002 Alternative approach for direct APC using scatterometry data

Boaz Brill, Yoel Cohen, Igor Turovets, Dario Elyasy, Tzevi Beatus

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Proceedings Volume 4689, Metrology, Inspection, and Process Control for Microlithography XVI; (2002) https://doi.org/10.1117/12.473521
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

Scatterometry is a promising method, capable of providing accurate profile information for a large range of applications. However, applying scatterometry to the production environment and applying it to APC is still difficult. In this paper we propose an alternative approach in which we apply a Neural Network to directly correlate scatterometry raw data and the lithography process control parameters. The proposed method is much easier to use than normal scatterometry, and can therefore be applied to APC much faster.

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Boaz Brill, Yoel Cohen, Igor Turovets, Dario Elyasy, and Tzevi Beatus "Alternative approach for direct APC using scatterometry data", Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); https://doi.org/10.1117/12.473521

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