Evaluation of ASML ATHENA alignment system on Intel front-end processes

Graham M. Pugh; Maria Rebecca Giorgi

doi:10.1117/12.473468

16 July 2002 Evaluation of ASML ATHENA alignment system on Intel front-end processes

Graham M. Pugh, Maria Rebecca Giorgi

Proceedings Volume 4689, Metrology, Inspection, and Process Control for Microlithography XVI; (2002) https://doi.org/10.1117/12.473468
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

An evaluation of the ASML ATHENA alignment system was performed using marks placed in the scribeline of an Intel test chip used for 130 nm node processing. Exposures were performed using two ASML scanners at IMEC at the isolation, gate, contact and first metal layers, with extreme process splits performed at Intel at critical steps in between. The splits were arranged as factorials in order to evaluate the process sensitivity of the alignment system. The modeled overlay terms with the largest sensitivities are discussed. In addition, data taken by the scanners on various mark/recipe combinations is analyzed to provide insight into overlay optimization and potential alignment system limitations.

Citation Download Citation

Graham M. Pugh and Maria Rebecca Giorgi "Evaluation of ASML ATHENA alignment system on Intel front-end processes", Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); https://doi.org/10.1117/12.473468

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available