16 July 2002 New developments in excimer laser metrology at 157 nm
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Abstract
We have constructed a prototype calorimeter that will serve as a primary standard for measurements of 157 nm excimer laser power and energy. The construction and performance of the prototype will be discussed. In addition, we have performed a series of thermal characterization measurements on the prototype. From these measurements, we deduce that the uncertainty in the prototype's electrical calibration factor is less than 0.2 percent. This number is less than or comparable to the uncertainty of the NIST primary standards for use with 193 and 248 nm excimer lasers. The 157 nm standards are part of a beamsplitter-based measurement system for laser power and energy calibrations. To control and determine the ambient measurement conditions, we have constructed a nitrogen-purged enclosure for this system. We are able to achieve O2 concentrations of less than 3 parts per million (ppm) inside the enclosure.
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Marla L. Dowell, Marla L. Dowell, Richard D. Jones, Richard D. Jones, Holger Laabs, Holger Laabs, Christopher L. Cromer, Christopher L. Cromer, Robert D. Morton, Robert D. Morton, } "New developments in excimer laser metrology at 157 nm", Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); doi: 10.1117/12.473515; https://doi.org/10.1117/12.473515
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