Spectroscopic ellipsometry measurements with the Grating Division-of-Amplitude Photopolarimeter

Paul C. Nordine; D. Scott Hampton; Shankar Krishnan

doi:10.1117/12.473449

16 July 2002 Spectroscopic ellipsometry measurements with the Grating Division-of-Amplitude Photopolarimeter

Paul C. Nordine, D. Scott Hampton, Shankar Krishnan

Proceedings Volume 4689, Metrology, Inspection, and Process Control for Microlithography XVI; (2002) https://doi.org/10.1117/12.473449
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

The Grating Division-of-Amplitude Photopolarimeter (G-DOAP) obtains very rapid measurements of the complete polarization state of light over the spectral bandwidth of the instrument. Application to polarimetry, ellipsometry, and Mueller matrix ellipsometry is discussed. The use of MME is illustrated by measurements and analysis of the depolarization produced by reflection at a thick oxide-coated silicon wafer.

Citation Download Citation

Paul C. Nordine, D. Scott Hampton, and Shankar Krishnan "Spectroscopic ellipsometry measurements with the Grating Division-of-Amplitude Photopolarimeter", Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); https://doi.org/10.1117/12.473449

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