16 July 2002 Spectroscopic ellipsometry measurements with the Grating Division-of-Amplitude Photopolarimeter
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Abstract
The Grating Division-of-Amplitude Photopolarimeter (G-DOAP) obtains very rapid measurements of the complete polarization state of light over the spectral bandwidth of the instrument. Application to polarimetry, ellipsometry, and Mueller matrix ellipsometry is discussed. The use of MME is illustrated by measurements and analysis of the depolarization produced by reflection at a thick oxide-coated silicon wafer.
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Paul C. Nordine, Paul C. Nordine, D. Scott Hampton, D. Scott Hampton, Shankar Krishnan, Shankar Krishnan, } "Spectroscopic ellipsometry measurements with the Grating Division-of-Amplitude Photopolarimeter", Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); doi: 10.1117/12.473449; https://doi.org/10.1117/12.473449
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